Comparison in the growth and properties of RF sputtered ｦﾌc-Si:H and glow discharge-chemical vapor deposited ｦﾌc-Si:H films

Comparison in the growth and properties of RF sputtered ｦﾌc-Si:H and glow discharge-chemical vapor deposited ｦﾌc-Si:H films

著者名:

掲載資料名:

Crystallization and related phenomena in amorphous materials : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

321

発行年:

1994

開始ページ:

731

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992207 [1558992200]

言語:

英語

請求記号:

M23500/321

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020792
シリーズID:	PA00000011
会議名:	Symposium on crystallization and related phenomena in amorphous materials
回次:	1993
会議開催地:	Boston, MA, USA
会議開催年:	1993.11.29-1993.12.02

類似資料:

1 国際会議録 COMPARISON OF THE PROPERTIES OF SPUTTERED AND GLOW DISCHARGE a-Ge:H FILMS Wetsel, A. E., Jones, S. J., Turner, W. A., Pang, D., Paul, W., El Zawawi, I., Bouizem, Y., Chahed, K., Theye, M. I., … Materials Research Society	7 国際会議録 A Comparison of the Mechanical Properties of RF- and DC- Sputter-Deposited Cr Thin Films M.W. Park, W.W. Lee, J.G. Lee, C.M. Lee Trans Tech Publications
2 国際会議録 Origin and Incorporation Mechanism for Oxygen Contaminants in a-Si:H and ｦﾌc-Si:H Films Prepared by the Very High Frequency (70 MHz) Glow Discharge Technique Kroll, U., Meier, J., Keppner, H., Littlewood, S. D., Kelly, I. E., Giannoules, P., Shah, A. MRS - Materials Research Society	8 国際会議録 Customized off-axis illumination aperture filtering for sub-0.18-ｦﾌm KrF Lithography Hsia,C.-C., Gau,T.-S., Yang,C.-H., Liu,R.-C., Chang,C.-H., Chen,L.-J., Wang,C.-M., Chen,J.F., Smith,B.W., Hwang,G.-W., … SPIE - The International Society for Optical Engineering
3 国際会議録 2-ｦﾌm-pumped 8-12-ｦﾌm OPO source for remote chemical sensing Chandra,S., Wager,M.E., Clayton,B., Geiser,A.G., Allik,T.H., Ahl,J.L., Miller,C.R., Budni,P.A., Ketteridge,P.A., … SPIE - The International Society for Optical Engineering	9 国際会議録 Wafer-bonded AlGaInAs 1.3-ｦﾌm vertical-cavity surface-emitting lasers Qian,Y., Zhu,Z., Lo,Y.H., Hou,H.Q., Hammons,B.E., Huffaker,D.L., Deppe,D.G., Lin,W., Wang,M.C., Yu,Y.K. SPIE-The International Society for Optical Engineering
4 国際会議録 HIGH-BANDGAP a-Si:H DEPOSITED BY CONCENTRIC-ELECTRODE RF GLOW DISCHARGE Conde, J.P., Lau, F., Chu, V., Chan, K.K., Blum, J.M., Arienzo, M. Materials Research Society	10 国際会議録 Erbium-doped tellurite glasses for 1.5-ｦﾌm broadband amplification Neindre,L.Le, Luo,T., Hwang,B.-C., Watson,J., Jiang,S., Peyghambarian,N. SPIE - The International Society for Optical Engineering
5 国際会議録 Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron Sputtering Lei, Y.M., Yu, Y.H., Cheng, L.L., Lin, L., Sundaraval, B., Luo, E.Z., Lin, S., Ren, C.X., Cheung, W.Y., Wong, S.P., Xu, … Trans Tech Publications	11 国際会議録 The Optical and Electrical Properties of AZO Films Deposited at Room Temperature J.-C. Hsu, Y.-H. Lin, Y.-Y. Chen Society of Vacuum Coaters
6 国際会議録 Mix-and-match lithography processes for 0.1-ｦﾌm MOS transistor device fabrication Yew,J.-Y., Chen,L.-J., Nakamura,K., Chao,T.-S., Lin,H.-C. SPIE-The International Society for Optical Engineering	12 国際会議録 IMPROVED STABILITY OF RF GLOW DISCHARGE DEPOSITED a-Si:H ACHIEVED BY HYDROGEN DILUTION OF SILANE van Oort, R.C., Geerts, M.J., van den Heuvel, J.C. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12