Comparison of AIN films grown by RF magnetron sputtering and ion-assisted molecular beam epitaxy
- 著者名:
Chan, J. Fu, T. Cheung, N. W. Ross, J. Newman, N. Rubin, M. - 掲載資料名:
- III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 300
- 発行年:
- 1993
- 開始ページ:
- 435
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991965 [1558991964]
- 言語:
- 英語
- 請求記号:
- M23500/300
- 資料種別:
- 国際会議録
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10
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Structural and optical properties of indium nitride grown by plasma-assisted molecular beam epitaxy
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