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Silicon-Framed Tensile Specimens: Techniques and Results

著者名:
Read, D. T.  
掲載資料名:
Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
518
発行年:
1998
開始ページ:
167
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994249 [1558994246]
言語:
英語
請求記号:
M23500/518
資料種別:
国際会議録

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