The Surface Modification with Fluorocarbon Thin Films For the Prevention of Stiction in MEMS

The Surface Modification with Fluorocarbon Thin Films For the Prevention of Stiction in MEMS

著者名:

掲載資料名:

Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

518

発行年:

1998

開始ページ:

143

出版情報:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994249 [1558994246]

言語:

英語

請求記号:

M23500/518

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020785
シリーズID:	PA00000011
会議名:	Symposium on microelectromechanical structures for materials research
回次:	1998
会議開催地:	San Francisco, CA, USA
会議開催年:	1998.04.15-1998.04.16

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