Si1-xGexCy FILM FORMATION BY PULSED EXCIMER LASER CRYSTALLIZATION OF HEAVILY Ge AND C IMPLANTED SILICON

Si1-xGexCy FILM FORMATION BY PULSED EXCIMER LASER CRYSTALLIZATION OF HEAVILY Ge AND C IMPLANTED SILICON

著者名:

Fogarassy, E.

掲載資料名:

Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

354

発行年:

1995

開始ページ:

585

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992559 [1558992553]

言語:

英語

請求記号:

M23500/354

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020770
シリーズID:	PA00000011
会議名:	Symposium on beam-solid interactions for materials synthesis and characterization
回次:	1994
会議開催地:	Boston, MA, USA
会議開催年:	1994.11.28-1994.12.02

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1 国際会議録 Synthesis of high-quality Si1-yCy and Si1-x-yGexCy epitaxial layers on (100)Si by ion implantation and pulsed excimer laser crystallization Grob,J.-J., Fogarassy,E., Grob,A., Muller,D., Prevot,B., Stuck,R., de Unamuno,S., Boher,P., Stehle,M.X. SPIE-The International Society for Optical Engineering	7 国際会議録 CHARACTERIZATION OF THE SUBSTRATE INTERFACE OF EXCIMER LASER CRYSTALLIZED POLYCRYSTALLINE SILICON THIN FILMS Anderson, G. B., Boyce, J. B., Fork, D. K., Johnson, R. I., Mei, P., Ready, S. E. MRS - Materials Research Society
2 国際会議録 The growth of Si1-yCy/Si and Si1-x-yGexCy/Si heterostructures by ion implantation and pulsed excimer laser-induced epitaxy Fogarassy,E., Grob,A., Grob,J.-J., Muller,D., Prevot,B., Stuck,R., Boher,P., Stehle,M.X. SPIE-The International Society for Optical Engineering	8 国際会議録 PULSE-TO-PULSE LASER STABILITY EFFECTS ON MULTIPLE SHOT EXCIMER LASER CRYSTALLIZED a-Si THIN FILMS Johnson, R. I., Anderson, G. B., Boyce, J. B., Fork, D. K., Mei, P., Ready, S. E. MRS - Materials Research Society
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