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STRAIN MEASUREMENTS OF SiGeC HETEROEPITAXIAL LAYERS ON Si(100) USING ION BEAM ANALYSIS

著者名:
Sego, S.
Culbertson, R. J.
Ye, P.
Hearne, S.
Xiang, J.
Herbots, N.
Atzmon, Z.
Bair, A. E.
さらに 3 件
掲載資料名:
Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
354
発行年:
1995
開始ページ:
461
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992559 [1558992553]
言語:
英語
請求記号:
M23500/354
資料種別:
国際会議録

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