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CHARACTERIZATION AND PERFORMANCE OF CARBON FILMS DEPOSITED BY PLASMA AND ION BEAM BASED TECHNIQUES

著者名:
Walter, K. C.
Kung, H.
Levine, T.
Tesmer, J. T.
Kodali, P.
Wood, B. P.
Rej, D. J.
Nastasi, M.
Koskinen, J.
Hirvonen, J-P.
さらに 5 件
掲載資料名:
Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
354
発行年:
1995
開始ページ:
87
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992559 [1558992553]
言語:
英語
請求記号:
M23500/354
資料種別:
国際会議録

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