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XRD TEXTURE AND MORPHOLOGY ANALYSIS OF POLYCRYSTALLINE LPCVD GERMANIUM-SILICON

著者名:
掲載資料名:
Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
343
発行年:
1994
開始ページ:
721
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992436 [155899243X]
言語:
英語
請求記号:
M23500/343
資料種別:
国際会議録

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