Applications of neural networks in IC lithography
- 著者名:
- Mahendra,M. ( Texas Tech Univ. )
- Krile,T.F.
- 掲載資料名:
- Applications and science of artificial neural networks II : 9-12 April, 1996, Orlando, Florida
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2760
- 発行年:
- 1996
- 開始ページ:
- 702
- 終了ページ:
- 712
- 出版情報:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421418 [0819421413]
- 言語:
- 英語
- 請求記号:
- P63600/2760
- 資料種別:
- 国際会議録
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