Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip

Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip

著者名:

Rangelow,I.W. ( Univ.Kassel )

掲載資料名:

Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2879

発行年:

1996

開始ページ:

56

終了ページ:

64

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422774 [0819422770]

言語:

英語

請求記号:

P63600/2879

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020749
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
回次:	1996 : 2nd
会議開催地:	Austin, TX, USA
会議開催年:	1996.10.14-1996.10.15

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