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Nanoscale processing by gas-cluster ion beams:novel technique in ion-beam processing

著者名:
掲載資料名:
Third international conference on intelligent materials : third European conference on smart structures and materials, Lyon/3-4-5 June 1996, center of congress "L'Espace tete d'or"
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2779
発行年:
1996
開始ページ:
759
終了ページ:
764
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421654 [0819421650]
言語:
英語
請求記号:
P63600/2779
資料種別:
国際会議録

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