Advances in infrared spectroscopic methods for epitaxial film characterization
- 著者名:
- Carpio,R.A. ( SEMATECH )
- Fowler,B.W.
- Theiss,W.
- 掲載資料名:
- Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2638
- 発行年:
- 1995
- 開始ページ:
- 72
- 終了ページ:
- 83
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420046 [0819420042]
- 言語:
- 英語
- 請求記号:
- P63600/2638
- 資料種別:
- 国際会議録
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Electrochemical Society |
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SPIE-The International Society for Optical Engineering |
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SPIE-The International Society for Optical Engineering |
Electrochemical Society |
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SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |