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Roughness parameters and surface deformation measured by "Coherence Radar"

著者名:
掲載資料名:
International Conference on Applied Optical Metrology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3407
発行年:
1998
開始ページ:
133
終了ページ:
140
出版情報:
Bellingham, Wash.: SPIE--International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428592 [0819428590]
言語:
英語
請求記号:
P63600/3407
資料種別:
国際会議録

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