FTIR reflectance characterization of SIMOX buried oxide layers

FTIR reflectance characterization of SIMOX buried oxide layers

著者名:

Yakovlev, Victor A. ( On-Line Technologies Inc. )
Charpenay, Sylvie
Rosenthal, Peter A.
Solomon, Peter R.
Xu, Jiazan

掲載資料名:

Optical diagnostic methods for inorganic transmissive materials : 20-21 July 1998, San Diego, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3425

発行年:

1998

開始ページ:

2

終了ページ:

9

出版情報:

Bellingham, Wash., USA: SPIE

ISSN:

0277786X

ISBN:

9780819428806 [0819428809]

言語:

英語

請求記号:

P63600/3425

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020671
シリーズID:	PA00000029
会議名:	Optics & Photonics : Optical Diagnostic Methods for Inorganic Transmissive Materials
回次:	1998
会議開催地:	San Diego, CA, USA
会議開催年:	1998.07.20-1998.07.21

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