Low-temperature quartz-to-silicon bonding for SAW applications
- 著者名:
- Berthold,A. ( Delft Univ.of Technology (Netherlands) )
- Sarro,P.M. ( Delft Univ.of Technology (Netherlands) )
- Vallekoop,M.J. ( Delft Univ.of Technology (Netherlands) )
- 掲載資料名:
- Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3328
- 発行年:
- 1998
- 開始ページ:
- 81
- 終了ページ:
- 85
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427724 [0819427721]
- 言語:
- 英語
- 請求記号:
- P63600/3328
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Silicon thermo-optic micromodulators for low-cost low-performance fiber-in-the-loop applications
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
12
国際会議録
EXTREME SUPERSATURATION OF OXYGEN IN LOW TEMPERATURE EPITAXIAL SILICON AND SILICON-GERMANIUM ALLOYS
Materials Research Society |