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Evaluation of optical supersmooth surface using AFM and comparison to interference method

著者名:
  • Li,J. ( Jiangxi Academy of Sciences (China) )
  • Li,D. ( Tsinghua Univ.(China) )
  • Zhang,X. ( Jiangxi Academy of Sciences (China) )
  • Li,X. ( Jiangxi Academy of Sciences (China) )
  • Zhao,A. ( Jiangxi Academy of Sciences (China) )
掲載資料名:
Current developments in optical elements and manufacturing : 16-18 September 1998, Beijing, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3557
発行年:
1998
開始ページ:
336
終了ページ:
344
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430182 [0819430188]
言語:
英語
請求記号:
P63600/3557
資料種別:
国際会議録

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