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Pulsed Excimer Laser Crystallization and Doping for the Fabrication of Poly-Si and SiGe TFTs

著者名:
掲載資料名:
Excimer lasers
シリーズ名:
NATO ASI series. Series E, Applied sciences
シリーズ巻号:
265
発行年:
1994
開始ページ:
387
終了ページ:
402
総ページ数:
16
出版情報:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792328193 [0792328191]
言語:
英語
請求記号:
N11482/265
資料種別:
国際会議録

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