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Thin film deposition by pulsed laser ablation:the direct simulation Monte Carlo

著者名:
掲載資料名:
XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3574
発行年:
1998
開始ページ:
750
終了ページ:
754
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430397 [0819430390]
言語:
英語
請求記号:
P63600/3574
資料種別:
国際会議録

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