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Direct ion beam deposition of diamond-like films from RF inductively coupled (IC) plasma source: Mechanical, electrical, and optical properties

著者名:
Druz, B.
Zaritskiy, I.
Williams, K.
Hayes, A.
Polyakov, V. I.
Kchomich, A. V.
Li, Xiodung
Bhushan, Bharat
さらに 3 件
掲載資料名:
Amorphous and nanostructured carbon : sympoisum held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
593
発行年:
2000
開始ページ:
273
出版情報:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995017 [1558995013]
言語:
英語
請求記号:
M23500/593
資料種別:
国際会議録

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