Blank Cover Image

A novel integrated MEMS process using fluorocarbon films deposited with a deep reactive ion etching (DRIE) tool

著者名:
Ayon, A. A.
Chen, D-Z.
Khanna, R.
Braff, R.
Sawin, H. H.
Schmidt, M. A.
さらに 1 件
掲載資料名:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
605
発行年:
2000
開始ページ:
141
出版情報:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995130 [1558995137]
言語:
英語
請求記号:
M23500/605
資料種別:
国際会議録

類似資料:

Ayon, A.A., Chen, K-S., Lohner, K.A., Spearing, S.M., Sawin, H.H., Schmidt, M.A.

Materials Research Society

Chen, K-S., Ayon, A.A., Lohner, K.A., Kepets, M.A., Melconian, T.K., Spearing, S.M.

Materials Research Society

Jensen, S., Jensen, J.M., Quaade, U.J., Hansen, O.

SPIE - The International Society of Optical Engineering

Kwon, O., Sawin, H.

Electrochemical Society

Cochran, K.R., Fan, L., DeVoe, D.L.

SPIE-The International Society for Optical Engineering

Shew, B.-Y., Huang, R.-S., Wang, D.-J., Perng, S.-Y., Kuan, C.-K., Cai, Y.Q., Chow, P.C., Schwoerer-Boehning, M., …

SPIE-The International Society for Optical Engineering

S.P. Koirala, I.U. Abhulimen, M.H. Gordon, H. Abu-Safe, S.L. Burkett

Society of Vacuum Coaters

Manginell, Ronald P., Frye-Mason, Gregory C., Kent Schubert, W., Schul, Randy J., Willison, Christi G.

Electrochemical Society

Mocella, M. T., Jenkins, M. W., Sawin, H. H., Allen, K. D.

Materials Research Society

Sun, Hongwei, Hill, Tyrone, Schmidt, Martin, Boning, Duane

Materials Research Society

Sheridan, D. C., Casady, J. B., Ellis, E. C., Siergiej, R. R., Cressler, J. D., Strong, R. M., Urban, W. M., Valek, W. …

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12