LASER INDUCED EPITAXIAL CoSi2 FORMATION

LASER INDUCED EPITAXIAL CoSi2 FORMATION

著者名:

掲載資料名:

Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

320

発行年:

1994

開始ページ:

421

出版情報:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992191 [1558992197]

言語:

英語

請求記号:

M23500/320

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020321
シリーズID:	PA00000011
会議名:	Symposium on silicides, germanides, and their interfaces
回次:	1993
会議開催地:	Boston, MA, USA
会議開催年:	1993.11.29-1993.12.02

類似資料:

1 国際会議録 ION-BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF NiSi2 AND CoSi2 Ridgway, M.C., Elliman, R.G., Williams, J.S. Materials Research Society	7 国際会議録 Formation and Structure of Epitaxial NiSi2 and CoSi2 Chen, L. J., Mayer, J. W., Tu, K. N. North-Holland
2 国際会議録 THE INFLUENCE OF IMPLANTATION-INDUCED NON-STOICHIOMETRY ON THE EPITAXIAL RECRYSTALLIZATION OF CoSi2 Ridgway, M. C., Vantomme, A., Bavel, A.-M. Van, Langouche, G. MRS - Materials Research Society	8 国際会議録 EFFECT OF AN INTERFACIAL Ti LAYER ON THE FORMATION OF CoSi2 ON Si Barmak, K., Clevenger, L. A., Agnello, P. D., Ganin, E., Copel, M., Dehaven, P., Falta, J., d'Heurle, F. M., Cabral Jr., … Materials Research Society
3 国際会議録 Diffusion in Cobalt Silicide During Silicide Formation Comrie M. C., McLeod E. J. Kluwer Academic Publishers	9 国際会議録 Epitaxial CoSi2 Formation by a Cr or Mo Interlayer Detavernier, Christophe, Van Meirhaeghe, Roland L., Cardon, Felix, Maex, K., Brijs, B., Vandervorst, W. Materials Research Society
4 国際会議録 Thermal Studies on Stress-Induced Void-Like Defects in Epitaxial-CoSi2 Formation Ho, C. S., Pey, K. L., Tung, C. H., Tee, K. C., Prasad, K., Saigal, D., Tan, J. J. L., Wong, H., Lee, K. H., Osipowicz, … MRS - Materials Research Society	10 国際会議録 EPITAXIAL CoSi2 FILM FORMATION ON (100) Si BY ANNEALING OF Co/Ti/Si STRUCTURE IN N2 Ogawa, Shinichi, Dass, M. Lawrence A., Fair, James A., Kouzaki, Takashi, Fraser, David B. MRS - Materials Research Society
5 国際会議録 CHARACTERIZATION OF EPITAXIAL CoSi2 FILMS GROWN ON Si Hamdi, a. H., Nicolet, M-A., Kao, Y, C., Tejwani, M., Wang, K L. Materials Research Society	11 国際会議録 Epitaxial NiSi2 and CoSi2 Interfaces Tung T. R., Levi J. F. A., Schrey F., Anzlowar M. Plenum Press
6 国際会議録 ELECTRON-RADIATION-INDUCED EPITAXIAL GROWTH OF CoSi2 ON Si (111) Nieh, C. W., Lin, T. L., Fathauer, R. W. Materials Research Society	12 国際会議録 GROWTH AND CHARACTERIZATION OF EPITAXIAL CoSi2-CONTACTS Adamski, C., Meiser, S., Uffmann, D., Niewohner, L., Schaffer, C. Materials Research Society

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