LOW TEMPERATURE PREPARATION OF BaTiO3 FILMS ON SILICON

LOW TEMPERATURE PREPARATION OF BaTiO3 FILMS ON SILICON

著者名:

掲載資料名:

Ferroelectric thin films III : symposium held April 13-16, 1993, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

310

発行年:

1992

開始ページ:

333

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992061 [1558992065]

言語:

英語

請求記号:

M23500/310

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020320
シリーズID:	PA00000011
会議名:	Symposium on ferroelectric thin films
回次:	3rd
会議開催地:	San Francisco, CA, USA
会議開催年:	1993.04.13-1993.04.16

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2 国際会議録 Electrical Properties of BaTiO3 Thin Films Flash-Evaporated on Si and SiO2/Si Cabellero, J. V., Avila, R. E., Fuenzalida, V. M., Eisele, I. MRS - Materials Research Society	8 国際会議録 Sol-gel preparation of PZT thin films with BaTiO3 seeds Wu,A., Vilarinho,P.M., Miranda Salvado,I.M., Baptista,J.L. SPIE-The International Society for Optical Engineering
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