Low-Temperature Formation of Ultrathin SiO2 Layers Using Direct Oxidation Method in a Catalytic Chemical Vapor Deposition System

Low-Temperature Formation of Ultrathin SiO2 Layers Using Direct Oxidation Method in a Catalytic Chemical Vapor Deposition System

著者名:

掲載資料名:

Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

567

発行年:

1999

開始ページ:

115

出版情報:

Warrendale, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994744 [1558994742]

言語:

英語

請求記号:

M23500/567

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020318
シリーズID:	PA00000011
会議名:	Symposium on ultrathin SiO2 and high-K materials for ulsi gate dielectrics
回次:	1999
会議開催地:	San Francisco, CA, USA
会議開催年:	1999.04.05-1999.04.08

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