Blank Cover Image

Structural Characterization and Crystallization Process of Nanostructured Silicon Thin Films Produced in Low-Pressure Silane Plasma

著者名:
掲載資料名:
Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
507
発行年:
1999
開始ページ:
933
出版情報:
Warrendale: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994133 [1558994130]
言語:
英語
請求記号:
M23500/507
資料種別:
国際会議録

類似資料:

1 国際会議録 Deposition of Nanostructured Silicon Thin Films by Means of the Selective Contribution of Particles in PECVD

Costa, J., Roura, P., Cabarrocas, P. Roca i, Viera, G., Bertran, E.

MRS - Materials Research Society
7 国際会議録 Helium Versus Hydrogen Dilution of Silane in the Deposition of Polymorphous Silicon Films: Effects on the Structure and the Transport Properties

Saadane, O., Lebib, S., Kharchenko, A. V., Suendo, V., Longeaud, C., Cabarrocas, P. Roca i

Materials Research Society
2 国際会議録 Plasma Deposition of Silicon Clusters: A Way to Produce Silicon Thin Films With Medium-Range Order?

Cabarrocas, P. Roca i

MRS - Materials Research Society
8 国際会議録 New Trends in Silicon Thin Films and Applications

Klcider, J.-P., Roca i Cabarrocas, P., Guedj, C.

Electrochemical Society
3 国際会議録 Thermal Desorption of Hydrogen in Si and SiC Nanoparticles Produced by Plasma-Enhanced Chemical Vapor Deposition

Costa, J., Fort, J., Sunol, J. J., Roura, P., Viera, G., Bertran, E.

MRS - Materials Research Society
9 国際会議録 Low Temperature Plasma Synthesis of Nanocrystals and their Application to the Growth of Crystalline Silicon and Germanium Thin Films

P. Roca i Cabarrocas, K.H. Kim, R. Cariou, M. Labrune, E.V. Johnson, M. Moreno, A. Torres Rios, S. Abolmasov, S. Kasouit

Materials Research Society
4 国際会議録 Thermal Oxidation Of Si Nanoparticles Grown By Plasma-Enhanced CVD

Bertran, E., Costa, J., Das, D., Farjas, J., Roura, P., Viera, G.

Materials Research Society
10 国際会議録 In Situ Study of the Optoelectronic Properties of Very Thin p-Type ｦﾌc-Si:H Films and the Potential Profile at the p-(ｦﾌc-Si:H)/i-(a-Si:H) Interface

Hamma, S., Cabarrocas, P. Roca i

MRS - Materials Research Society
5 国際会議録 Hydrogen Diffusion in Boron-Doped Hydrogenated Amorphous Silicon Films: Crystallization and Induced Structural Changes

Kail, F., Hadjadj, A., Cabarrocas, P. Roca i

Materials Research Society
11 国際会議録 PRODUCTION OF SILICON POWDER BY SQUARE-WAVE MODULATED RF SILANE PLASMA

Costa, J., Sardin, G., Campmany, J., Andujar, J.L., Canillas, A., Bertran, E.

Materials Research Society
6 国際会議録 Thermal Stabilization And Crystallization Of Nanometric Particles Of Si-C-N Produced By RF-Plasma Enhanced Chemical-Vapor-Deposition

Bertran, E., Farjas, J., Garcia-Caurel, E., Polo, M. C., Roura, P., Viera, G.

Materials Research Society
12 国際会議録 Switch-On Transients and Static Characteristics of Polymorphous and Amorphous Silicon Thin-Film Transistor

Tripathi, V., Mohapatra, Y. N., Cabarrocas, P. Roca i

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12