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Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-Film Resonators

著者名:
掲載資料名:
Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
444
発行年:
1997
開始ページ:
215
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993488 [1558993487]
言語:
英語
請求記号:
M23500/444
資料種別:
国際会議録

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