Blank Cover Image

Silicon Microhotplate Arrays as a Platform for Efficient Gas Sensing Thin Film Research

著者名:
Dimeo, F., Jr.
Semancik, S.
Cavicchi, R. E.
Suehle, J. S.
Tea, N. H.
Vaudin, M. D.
Kelliher, J. T.
さらに 2 件
掲載資料名:
Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
444
発行年:
1997
開始ページ:
203
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993488 [1558993487]
言語:
英語
請求記号:
M23500/444
資料種別:
国際会議録

類似資料:

1 国際会議録 MOCVD of SnO2 on Silicon Microhotplate Arrays for Use in Gas Sensing Applications

Dimeo, F., Jr., Semancik, S., Cavicchi, R. E., Suehle, J. S., Chaparala, P., Tea, N. H.

MRS - Materials Research Society
7 国際会議録 Chemical Vapor Deposition (CVD) of Iridium and Platinum Films and Gas-Phase Chemical Etching of Iridium Thin Films

Xu, C., Dimeo, F., Jr., Baum, T. H., Russell, M.

MRS - Materials Research Society
2 国際会議録 Observation of Film Growth Phenomena Using Micromachined Structures

DiMeo, F., Jr., Cavicchi, R. E., Semancik, S., Suehle, J. S., Tea, N. H., Kelliher, J. T.

MRS - Materials Research Society
8 国際会議録 Solid state gas microsensors for environmental and industrial monitoring

Walton,R.M., Cavicchi,R.E., Semancik,S., Panchapakesan,B., DeVoe,D.L., Aquino-Class,M.I., Allen,J.D., Suehle,J.S.

SPIE - The International Society for Optical Engineering
3 国際会議録 Microhotplate gas sensor arrays

Cavicchi,R.E., Semancik,S., Walton,R.M., Panchapakesan,B., DeVoe,D.L., Aquino-Class,M.I., Allen,J.D., Suehle,J.S.

SPIE - The International Society for Optical Engineering
9 国際会議録 Microarray study of temperature-dependent sensitivity and selectivity of metal/oxide sensing interfaces

Tiffany,J., Cavicchi,R.E., Semancik,S.

SPIE-The International Society for Optical Engineering
4 国際会議録 The Development and Evaluation of TiO2 Nanoparticle Films for Conductometric Gas Sensing on MEMS Microhotplate Platforms

Benkstein, Kurt D., Montgomery, Christopher B., Vaudin, Mark D., Semancik, Steve

Materials Research Society
10 国際会議録 HETEROEPITAXIAL Bi2Sr2CaCu2OX SUPERCONDUCTING THIN FILMS DEPOSITED ON LaAlO3 BY SOLID PHASE EPITAXY AND OMCVD

Chen, J., Lu, H.A., DiMeo, Jr., F., Wessels, B.W., Schulz, D.L., Marks, T.J., Schindler, J.L., Kannewurf, C.R.

Materials Research Society
5 国際会議録 Quantification of a single-component gas in air with a microhotplate gas sensor using partial least squares techniques

Ding,J., McAvoy,T.J., Cavicchi,R.E., Semancik,S.

SPIE - The International Society for Optical Engineering
11 国際会議録 *DEVELOPMENT OF TAILORED FILMS AND SURFACES FOR USE IN ADVANCED CHEMICAL SENSORS

Semancik, Steve, Cavicchi, Richard

Materials Research Society
6 国際会議録 Micromachined array studies of tin oxide films: Nucleation, structure and gas sensing characteristics

Panchapakesan, B., DeVoe, D. L., Cavicchi, R. E., Walton, R. M., Semancik, S.

MRS-Materials Research Society
12 国際会議録 STRUCTURE AND MORPHOLOGY OF Pd OVERLAYERS ON EPITAXIAL SnO2 FILMS STUDIED WITH THE ATOMIC FORCE MICROSCOPE

Lad, R.J., Matthews, M.J., Antonik, M.D., Cavicchi, R.E., Semancik, S.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12