Effect of Thickness and Substrates on the Mechanical Properties of Tantalum and Tantalum Nitride Thin Films

Effect of Thickness and Substrates on the Mechanical Properties of Tantalum and Tantalum Nitride Thin Films

著者名:

掲載資料名:

Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

403

発行年:

1996

開始ページ:

259

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993068 [1558993061]

言語:

英語

請求記号:

M23500/403

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020303
シリーズID:	PA00000011
会議名:	Symposium on polycrystalline thin films
回次:	2nd
会議開催地:	Boston, MA, USA
会議開催年:	1995.11.27-1995.12.01

類似資料:

1 国際会議録 Effect of Thickness and Annealing on Stress in Tantalum and Tantalum Nitride Thin Film Hard Coatings Saha, Ranjana, Inturi, Rama B., Barnard, John A. MRS - Materials Research Society	7 国際会議録 The Effect of Ta and N Content on Mechanical Properties of DC Magnetron Sputtered FeN and FeTaN Thin Films Deng, Hong, Minor, M. Kevin, Barnard, John A. MRS - Materials Research Society
2 国際会議録 Evaluation of Mechanical Properties of Sputtered Ceramic Films from Nanoindentation and Wafer Curvature Techniques Inturi, Rama B., Barnard, John A. MRS - Materials Research Society	8 国際会議録 GROWTH STRUCTURE, AND THIN FILM STRESS IN TiAl AND Ti3Al FILMS Chinmulgund, M., Inturi, R. B., Barnard, J. A. MRS - Materials Research Society
3 国際会議録 Characterization of the Mechanical and Tribological Properties of Sputtered a:SiC Thin Films Scharf, T. W., Inturi, R. B., Barnard, J. A. MRS - Materials Research Society	9 国際会議録 Synthesis of Carbon Nitride Composite Thin Films Prepared by Pulsed Laser Deposition Method Kumar, Ashok, Inturi, R. B., Ekanayake, U., Chan, H. L., You, Q., Wattuhewa, G., Barnard, J. A. MRS - Materials Research Society
4 国際会議録 MECHANICAL PROPERTIES AND WEAR RESISTANCE OF HIGH MOMENT THIN FILM HEAD MATERIALS Deng, H., Inturi, V. R., Barnard, J. A. MRS - Materials Research Society	10 国際会議録 Mechanical Properties of Laser Processed Diamond-Like Carbon Films Kumar, Ashok, Inturi, R. B., Vohra, Y., Ekanayake, U., Shu, N., Kjendal, D., Wattuhewa, G., Barnard, J. A. MRS - Materials Research Society
5 国際会議録 MICRO-MECHANICAL CHARACTERIZATION OF TANTALUM NITRIDE THIN FILMS ON SAPPHIRE SUBSTRATES Venkataraman, Shankar K., Nelson, John C., Moody, Neville R., Kohlstedt, David L., Gerberich, William W. MRS - Materials Research Society	11 国際会議録 Growth and Characterization of Hard Nitrides Films Prepared by Pulsed Laser Deposition Inturi, R. B., Kumar, Ashok, Ekanayake, U., Shu, N., Barnard, J. A. MRS - Materials Research Society
6 国際会議録 Mechanical Properties of CaF2 Single Crystal Substrates Determined from Nanoindentation Techniques Aruga, A., Inturi, R. B., Barnard, J. A., Bradt, R. C. MRS - Materials Research Society	12 国際会議録 THIN FILM STRESS IN METAL/CERAMIC MICROLAMINATES Inturi, R. B., Barnard, J. A., Chinmulgund, M., Jarratt, J. D. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12