Controlled Grain Size and Location in Ge Thin Films on Silicon Dioxide by Low Temperature Selective Solid Phase Crystallization

Controlled Grain Size and Location in Ge Thin Films on Silicon Dioxide by Low Temperature Selective Solid Phase Crystallization

著者名:

掲載資料名:

Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

403

発行年:

1996

開始ページ:

113

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993068 [1558993061]

言語:

英語

請求記号:

M23500/403

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020303
シリーズID:	PA00000011
会議名:	Symposium on polycrystalline thin films
回次:	2nd
会議開催地:	Boston, MA, USA
会議開催年:	1995.11.27-1995.12.01

類似資料:

1 国際会議録 Polycrystalline Si Films Fabricated by Low-Temperature Selective Nucleation and solid-Phase Epitaxy Process Chen, Claudine M., Atwater, Harry A. MRS - Materials Research Society	7 国際会議録 Optical Characterization of Solid Phase Crystallization of Silicon Thin Films Obtained by LPCVD Modreanu, M., Gartner, M., Cobianu, C., Hurley, P. Electrochemical Society
2 国際会議録 STABILITY OF NANOMETER-SIZE Si CRYSTALS IN AMORPHOUS Si THIN FILMS UNDER ION IRRADIATION Yang, Chih M., Atwater, Harry A. MRS - Materials Research Society	8 国際会議録 Large-Grain Polysilicon Films With Low Intra- Granular Defect Density By Low-Temperature Solid-Phase Crystallization Bo, Xiang-Zheng, Yao, Nan, Sturm, J.C. Materials Research Society
3 国際会議録 LOW ENERGY ION BOMBARDMENT AND MICROSTRUCTURAL EVOLUTION IN THIN FILMS Yang, Chih M., Atwater, Harry A. Materials Research Society	9 国際会議録 A Phase Diagram of Low Temperature Epitaxial Silicon Grown by Hot-Wire Chemical Vapor Deposition for Photovoltaic Devices Richardson, Christine Esber, Kayes, Brendan M., Dicken, Matthew J., Atwater, Harry A. Materials Research Society
4 国際会議録 *Ni-induced selective nucleation and solid phase epitaxy of large-grained poly-Si on glass Puglisi, Rosaria A., Tanabe, Hiroshi, Chen, Claudine M., Atwater, Harry A., Rimini, Emanuele MRS-Materials Research Society	10 国際会議録 Advanced excimer laser crystallization techniques of Si thin film for location control of large grain on glass Ishihara,R., Wilt,P.Ch.van der, Dijk,B.D.van, Burtsev,A., Voogt,F.C., Bertens,G.J., Metselaar,J.W., Beenakker,C.I.M. SPIE-The International Society for Optical Engineering
5 国際会議録 A Phase Diagram for Morphology and Properties of Low Temperature Deposited Polycrystalline Silicon Grown by Hot-Wire Chemical Vapor Deposition Richardson, Christine E., Mason, Maribeth S., Atwater, Harry A. Materials Research Society	11 国際会議録 ION BEAM ENHANCED GRAIN GROWTH IN THIN FILMS Atwater, Harry A., Thompson, Carl V., Smith, Henry T. Materials Research Society
6 国際会議録 Grain Size Control by Means of Solid Phase Crystallization of Amorphous Silicon Jordi Farjas, Pere Roura, Pere Roca i Cabarrocas Materials Research Society	12 国際会議録 Location Control of Crystal Grains in Excimer Laser Crystallization of Silicon Thin Films for Single-Grain TFTs Kumomi, Hideya, Wakiyama, Hiroaki, Nakagawa, Gou, Makihira, Kenji, Asano, Tanemasa Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12