STEADY-STATE VERSUS RAPID THERMAL ANNEALING OF PHOSPHORUS-IMPLANTED PSEUDOMORPHIC Si(100)/Ge0.12Si0.88
- 著者名:
Lie, D. Y. C. Song, J. H. Theodore, N. D. Eisen, F. Nicolet, M. -A. Carns, T. K. Wang, K. L. Kinoshita, H. Huang, T-H. Kwong, D. L. - 掲載資料名:
- Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 342
- 発行年:
- 1994
- 開始ページ:
- 51
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992429 [1558992421]
- 言語:
- 英語
- 請求記号:
- M23500/342
- 資料種別:
- 国際会議録
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1
国際会議録
Dopant activation and epitaxial regrowth in p-implanted pseudomorphic Ge0.12Si0.88 layers on Si(100)
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