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Micromachined probes for high-frequency scanning force microscopy and scanning thermal microscopy

著者名:
Stopka,M. ( Univ.of Kassel )
Munster,S.
Leinhos,T.
Mihalcea,Ch.
Scholz,W.
Leyk,A.
Mertin,W.
Oesterschulze,E.
さらに 3 件
掲載資料名:
Micromachining and Imaging
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3009
発行年:
1997
開始ページ:
92
終了ページ:
100
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424204 [081942420X]
言語:
英語
請求記号:
P63600/3009
資料種別:
国際会議録

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