Near-diffraction-limited excimer laser beam from a XeCl POPA system | 東京工業大学附属図書館文献データベース

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Near-diffraction-limited excimer laser beam from a XeCl POPA system

著者名:

Bollanti,S. ( ENEA )

さらに 5 件

掲載資料名:

High-Power Lasers: Gas and Solid State Lasers

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2788

発行年:

1996

開始ページ:

55

終了ページ:

62

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819421746 [081942174X]

言語:

英語

請求記号:

P63600/2788

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020269
シリーズID:	PA00000029
会議名:	Lasers, Optics, and Vision for Productivity in Manufacturing : High-Power Lasers:Gas and Solid State Lasers
回次:	1996
会議開催地:	Besancon, France
会議開催年:	1996.06.10-1996.06.11

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2 国際会議録 Industrial large-aperture XeCl Laser for surface processing Letardi,T., Baldesi,A., Bollanti,S., Bonfigli,F., Lazzaro,P.Di, Flora,F., Giordano,G., Marinai,A., Murra,D., Schina,G., … SPIE - The International Society for Optical Engineering	8 国際会議録 Excimer-laser-driven EUV plasma source for one-shot one-pattern projection microlithography P. Di. Lazzaro, G. Altieri, D. Amodio, S. Bollanti, A. Conti, F. Flora, T. Letardi, L. Mezi, D. Murra, E. Tefouet Kana, … SPIE - The International Society of Optical Engineering
3 国際会議録 Amorphous silicon crystallization by a long-pulse excimer laser Lazzaro,P.Di., Bollanti,S., Bonfigli,F., Flora,F., Giordano,G., Letardi,T., Murra,D., Zheng,C.E., Baldesi,A. SPIE-The International Society for Optical Engineering	9 国際会議録 Toward a high-average-power and debris-free soft x-ray source for microlithography pumped by a long-pulse excimer laser Bollanti,S, Lazzaro,P.Di, Flora,F., Letardi,T., Marinai,A., Nottola,A, Vigli-Papadaki,K., Vitali,A, Bonfigli,F., … SPIE - The International Society for Optical Engineering
4 国際会議録 Beam quality of a XeCl excimer laser vs. the repetition rate Lazzaro,P.Di, Bollanti,S., Bonfigli,F., Flora,F., Letardi,T., Murra,D. SPIE - The International Society for Optical Engineering	10 国際会議録 Beam quality characterization and times-diffraction-limit estimation of two high-power exchimer lasers Bollanti,S., Lazzaro,P.Di, Murra,D. SPIE-The International Society for Optical Engineering
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