DUV resist profile improvement on TiN-deposited metal layer

DUV resist profile improvement on TiN-deposited metal layer

著者名:

Lin,C.-H. ( Taiwan Semiconductor Manufacturing Co. )
Chen,C.-C.
Jenq,J.-S.
Beeck,M.Op de
hove,L.Van den

掲載資料名:

Optical Microlithography IX

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2726

発行年:

1996

巻:

Part1

開始ページ:

427

終了ページ:

436

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819421029 [0819421022]

言語:

英語

請求記号:

P63600/2726

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020263
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Optical Microlithography
回次:	1996 : 9th
会議開催地:	Santa Clara, CA, USA
会議開催年:	1996.03.13-1996.03.15

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