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Magnetically actuated MEMS scanning mirror

著者名:
掲載資料名:
Miniaturized Systems with Micro-Optics and Micromechanics
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2687
発行年:
1996
開始ページ:
47
終了ページ:
52
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420619 [0819420611]
言語:
英語
請求記号:
P63600/2687
資料種別:
国際会議録

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