Fabrication of microlenses by combining silicon technology,mechanical micromachining and plastic molding

Fabrication of microlenses by combining silicon technology,mechanical micromachining and plastic molding

著者名:

Kohler,U. ( Forschungszentrum Karlsruhe GmbH )
Guber,A.E.
Bier,W.
Heckele,M.
Schaller,Th.

掲載資料名:

Miniaturized Systems with Micro-Optics and Micromechanics

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2687

発行年:

1996

開始ページ:

18

終了ページ:

22

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420619 [0819420611]

言語:

英語

請求記号:

P63600/2687

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020259
シリーズID:	PA00000029
会議名:	Photonics West : Miniaturized Systems with Micro-Optics and Micromechanics
回次:	1996
会議開催地:	San Jose, CA, USA
会議開催年:	1996.01.30-1996.01.31

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