Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD

Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD

著者名:

掲載資料名:

Trends and new applications of thin films : proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998

シリーズ名:

Materials science forum

シリーズ巻号:

287-288

発行年:

1998

開始ページ:

497

終了ページ:

498

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498154 [087849815X]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020224
シリーズID:	PA00000012
会議名:	International Symposium on Trends and New Applications of Thin Films - TATF
回次:	1998 : 6th
会議開催地:	Regensburg, Germany
会議開催年:	1998.03.00

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