Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD-Temperature Dependence

Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD-Temperature Dependence

著者名:

掲載資料名:

Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997

シリーズ名:

Materials science forum

シリーズ巻号:

264-268

発行年:

1998

巻:

Part1

開始ページ:

179

終了ページ:

182

出版情報:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878497911 [0878497919]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020223
シリーズID:	PA00000012
会議名:	ICSCIII-N : International Conference on Silicon Carbide, III-Nitrides Related Materials
回次:	1997 : 7th
会議開催地:	Stockholm, Sweden
会議開催年:	1997.09.00

類似資料:

1 国際会議録 Surface Micromachining of Polycrystalline SiC Deposited on SiO2 by APCVD Fleischman,A.J., Wei,X., Zorman,C.A., Mehregany,M. Trans Tech Publications	7 国際会議録 A Comparison of SiO2 and Si3N4 Masks for Selective Epitaxial Growth of 3C-SiC Films on Si Wu, C.H., Chung, J., Hong, M.H., Zorman, C.A., Pirouz, P., Mehregany, M. Trans Tech Publications
2 国際会議録 Behavior of Polycrystalline SiC and Si Surface-Micronrachined Lateral Resonant Structures at Elevated Temperatures Fleischman,A.J., Roy,S., Zorman,C.A., Mehregany,M. Trans Tech Publications	8 国際会議録 Characterization of LOW Stress, Undoped LPCVD Polycrystalline SiC Films for MEMS Applications Dunning, J., Fu, X.A., Mehregany, M., Zorman, C.A. Trans Tech Publications
3 国際会議録 Characterization of Polycrystalline SiC Grown on SiO2 and Si3N4 by APCVD for MEMS Applications Wu, C. -H., Zorman, C. A., Mehregany, M. Trans Tech Publications	9 国際会議録 Nitrogen-Doping of Polycrystalline 3C-SiC Films Deposited by Low Pressure Chemical Vapor Deposition Fu, X.A., Trevino, J., Mehregany, M., Zorman, C.A. Trans Tech Publications
4 国際会議録 The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process Wu, C.H., Chung, J., Hong, M.H., Zorman, C.A., Pirouz, P., Mehregany, M. Trans Tech Publications	10 国際会議録 Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique Fu, X.A., Dunning, J., Zorman, C.A., Mehregany, M. Trans Tech Publications
5 国際会議録 Spatial Uniformity of the Mechanical Properties of 3C-SiC Films Grown on 4-Inch Si Wafers as a Function of Film Growth Conditions Chandra,K., Zorman,C.A., Mehregany,M. Trans Tech Publications	11 国際会議録 Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices Dunning, J., Fu, X.A., Rajgopal, S., Mehregany, M., Zorman, C.A. Trans Tech Publications
6 国際会議録 Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD Chen, L., Fu, X.A., Zorman, C.A., Mehregany, M. Trans Tech Publications	12 国際会議録 XRD and XTEM Investigation of Polycrystalline Silicon Carbide on Polycrystalline Silicon Roy, S., Zorman, C. A., Wu, C. H., Fleischman, A. J., Mehregany, M. MRS - Materials Research Society

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