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Uniform stress effect on initial stages of oxygen precipitation in Czochralski-grown silicon (Invited Paper)

著者名:
Misiuk,A. ( Institute of Electron Technology (Poland) )  
掲載資料名:
Solid state crystals, growth and characterization : 7-11 October 1996, Zakopane, Poland
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3178
発行年:
1997
開始ページ:
230
終了ページ:
237
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426048 [0819426040]
言語:
英語
請求記号:
P63600/3178
資料種別:
国際会議録

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