0.50-ヲフm pitch metal integration in 0.18-ヲフm technology
- 著者名:
- DeBord,J.R.D. ( Texas Instruments Inc. )
- Jayaraman,V. ( Texas Instruments Inc. )
- Hewson,M.M. ( Texas Instruments Inc. )
- Lee,W.W. ( Texas Instruments Inc. )
- Ilzhoefer,J.R. ( Texas Instruments Inc. )
- 掲載資料名:
- Multilevel Interconnect Technology II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3508
- 発行年:
- 1998
- 開始ページ:
- 104
- 終了ページ:
- 109
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429674 [0819429678]
- 言語:
- 英語
- 請求記号:
- P63600/3508
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
国際会議録
Process control and optimization of conventional metal process for 0.18-ヲフm logic technology
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |