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Thin electroless barrier for copper films

著者名:
掲載資料名:
Multilevel Interconnect Technology II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3508
発行年:
1998
開始ページ:
65
終了ページ:
77
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429674 [0819429678]
言語:
英語
請求記号:
P63600/3508
資料種別:
国際会議録

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