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Spectroellipsometric study of diamondlike carbon films

著者名:
  • Guo,W. ( Sichuan Union Univ.(China) )
  • Wong,S. ( Chinese Univ.of Hong Kong )
  • Zhu,Z. ( Sichuan Union Univ.(China) )
掲載資料名:
Automated optical inspection for industry: theory, technology, and applications II : 16-19 September, 1998, Beijing, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3558
発行年:
1998
開始ページ:
571
終了ページ:
577
出版情報:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430199 [0819430196]
言語:
英語
請求記号:
P63600/3558
資料種別:
国際会議録

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