Blank Cover Image

Spectroellipsometric study of optical and electrical properties of buried CoSi2 layers in silicon produced by MEYVA implantation

著者名:
  • Guo,W. ( Sichuan Union Univ.(China) )
  • Wong,S. ( Chinese Univ.of Hong Kong )
  • Zhu,Z. ( Sichuan Union Univ.(China) )
掲載資料名:
Automated optical inspection for industry: theory, technology, and applications II : 16-19 September, 1998, Beijing, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3558
発行年:
1998
開始ページ:
561
終了ページ:
570
出版情報:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430199 [0819430196]
言語:
英語
請求記号:
P63600/3558
資料種別:
国際会議録

類似資料:

1 国際会議録 Spectroellipsometric study of SiC/Si heterostructures produced by MEVVA implantation

Guo,W., Zhu,Z., Wong,S.

SPIE-The International Society for Optical Engineering
7 国際会議録 CoSi2 PRECIPITATE COARSENING DURING FORMATION OF BURIED EPITAXIAL CoSi2 LAYERS BY ION BEAM SYNTHESIS

Jebasinski, R., Mantl, S., Radermacher, K., Fichtner, P., Jager, W., Buchal, Ch.

Materials Research Society
2 国際会議録 Spectroellipsometric study of diamondlike carbon films

Guo,W., Wong,S., Zhu,Z.

SPIE-The International Society for Optical Engineering
8 国際会議録 STRUCTURAL PHASE TRANSITION IN BURIED CoSi2 LAYERS

Spanninga, W.G., Sandy, A.R., Niesen, L.

Materials Research Society
3 国際会議録 Spectroellipsometric study of buried SiC layers formed by carbon implantation with a metal vapor vacuum arc lon source

Guo,W., Zhu,D., Liu,Z.

SPIE-The International Society for Optical Engineering
9 国際会議録 MESOTAXY: GROWTH OF BURIED SINGLE-CRYSTAL CoSi2 LAYERS BY IMPLANTATION

White, Alice E., Short, K.T., Dynes, R.C., Garno, J.P., Gibson, J.M.

Materials Research Society
4 国際会議録 Electrical Characteristics of CoSi2 Layers Formed by MEVVA Implantation of Co into Si

Peng, Qical, Wong, S. P.

MRS - Materials Research Society
10 国際会議録 MESO-EPITAXY: EPITAXIAL GROWTH OF SILICON OVER BURIED SINGLE CRYSTAL CoSi2 LAYERS

Osenback, J. W., White, A. E., Short, K. T., Praefcke, H. C., Kannon, V C.

Materials Research Society
5 国際会議録 Formation and Characteristics of CoSi2 Layers Synthesized by MEVVA Implantation

Wong, S. P., Peng, Qicai, Cheung, W. Y., Guo, W. S., Xu, J. B., Wilson, I. H., Hark, S. K., Morton, R., Lau, S. S.

MRS - Materials Research Society
11 国際会議録 OPTICAL PROPERTIES AND INTERNAL PHOTOEMISSION IN EPITAXIAL COMPOSITES OF CoSi2 PARTICLES IN SILICON

Jimenez, J.R., Schowalter, L.J., Fathauer, R.W.

Materials Research Society
6 国際会議録 Formation and Characteristics of CoSi2 Layers Synthesized by MEVVA Implantation

Wong, S. P., Peng, Qical, Cheung, W. Y., Guo, W. S., Xu, J. B., Wilson, I. H., Hark, S. K., Morton, R., Lau, S. S.

MRS - Materials Research Society
12 国際会議録 Study of Damaged Top Layers of Silicon Crystals Produced by BF2+ Implantation by High Resolution X-ray Diffraction

Lal,Krishan, Bhagavannarayana,G., Virdi,G.S.

SPIE-The International Society for Optical Engineering, Narosa
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12