Large area uniform deposition of YBa2Cu3O7 thin films by a 90o off-axis sputtering technique

Large area uniform deposition of YBa2Cu3O7 thin films by a 90o off-axis sputtering technique

著者名:

Rao, R.A. ( Department of Mechanical Eng. and Materials Science, Duke University )
Gan, Q. ( Department of Mechanical Eng. and Materials Science, Duke University )
Eom, C.B. ( Department of Mechanical Eng. and Materials Science, Duke University )

掲載資料名:

Epitaxial oxide thin films II : symposium held November 26-30, 1995, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

401

発行年:

1996

開始ページ:

423

終了ページ:

428

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558993044 [1558993045]

言語:

英語

請求記号:

M23500/401

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020157
シリーズID:	PA00000011
会議名:	Symposium on epitaxial oxide thin films
回次:	2nd
会議開催地:	Boston, MA, USA
会議開催年:	1995.11.26-1995.11.30

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