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Submicron Patterning Techniques for Integrated Circuits

著者名:
掲載資料名:
Low-dimensional structures in semiconductors : from basic physics to applications
シリーズ名:
NATO ASI series. Series B, Physics
シリーズ巻号:
281
発行年:
1991
開始ページ:
89
終了ページ:
108
総ページ数:
20
出版情報:
New York: Plenum Press
ISBN:
9780306440861 [0306440865]
言語:
英語
請求記号:
N11479/281
資料種別:
国際会議録

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