Surface analysis of TiN thin film deposited on silicon(100)by excimer laser
- 著者名:
- 掲載資料名:
- Photonic Systems and Applications in Defense and Manufacturing
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3898
- 発行年:
- 1999
- 開始ページ:
- 232
- 終了ページ:
- 239
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435002 [0819435007]
- 言語:
- 英語
- 請求記号:
- P63600/3898
- 資料種別:
- 国際会議録
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