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Optical characteristics of PZT thin-film actuator-driven micro-optical scanning sensor with multilayer stacked device structure

著者名:
Totani,H. ( OMRON Corp. )
Ikeda,M.
Akiba,A.
Masuda,T.
Goto,H.
Matsumoto,M.
さらに 1 件
掲載資料名:
Miniaturized Systems with Micro-Optics and MEMS
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3878
発行年:
1999
開始ページ:
199
終了ページ:
206
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434753 [0819434752]
言語:
英語
請求記号:
P63600/3878
資料種別:
国際会議録

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