Recent advances in EUV phase-shifting point diffraction interferometry
- 著者名:
Naulleau,P. ( Lawrence Berkeley National Lab. ) Goldberg,K.A. Lee,S.H. Chang,C.C. Batson,P.J. Attwood,D.T.,Jr. Bokor,J. - 掲載資料名:
- EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3767
- 発行年:
- 1999
- 開始ページ:
- 154
- 終了ページ:
- 163
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432537 [0819432539]
- 言語:
- 英語
- 請求記号:
- P63600/3767
- 資料種別:
- 国際会議録
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