Photoluminescence studies of Czochralski-grown silicon pressure-annealed at<1000 K

Photoluminescence studies of Czochralski-grown silicon pressure-annealed at<1000 K

著者名:

Misiuk,A. ( Institute of Electron Technology )
Surma,H.B.

掲載資料名:

Single crystal growth, characterization, and applications : International Conference on Solid State Crystals '98 : 12-16 October 1998, Zakopane, Poland

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3724

発行年:

1999

開始ページ:

239

終了ページ:

243

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819431981 [0819431982]

言語:

英語

請求記号:

P63600/3724

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019931
シリーズID:	PA00000029
会議名:	International Conference on Solid State Crystals
回次:	1998
会議開催地:	Zakopane, Poland
会議開催年:	1998.10.12-1998.10.16

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1 国際会議録 Microstress in high-pressure temperature-treated Czochralski-grown silicon with oxygen concentration up to 1.2 x 10¹⁸ cm^-3 A. Misiuk Society of Photo-optical Instrumentation Engineers	7 国際会議録 Effect of Annealing at Argon Pressures up to 1.2 Gpa on Hydrogen-Plasma Etched and Hydrogen Implanted Single-Crystalline Silicon Misiuk, A., Misiuk, J.B.K., Barcz, A., Romano-Rodriguez, A., Antonova, I.V., Popov, V.P., Londos, C.A., Jun, J. Kluwer Academic Publishers
2 国際会議録 Uniform stress effect on initial stages of oxygen precipitation in Czochralski-grown silicon (Invited Paper) Misiuk,A. SPIE-The International Society for Optical Engineering	8 国際会議録 Formation and evolution of the oxygen precipitates in CZ-Si upon high pressure- high temperature treatment Antonova, I.V., Misiuk, A., Popov, V.P., Plotnikov, A.E., Surma, B. Electrochemical Society
3 国際会議録 Application of High Temperature-Pressure Treatment for Investigation of Defect Creation in Basic Materials of Modern Microelectronics: Czochralski Silicon and … Misiuk, A. Kluwer Academic Publishers	9 国際会議録 EBIC Study of Fe Precipitation on Bulk Stacking Fault in Czochralski-Grown Silicon Shen, B., Sekiguchi, T., Chen, P., Yang, K., Chen, Z. Z., Zheng, Y. D., Sumino, K. MRS - Materials Research Society
4 国際会議録 Annihilation of thermal donors in silicon annealed under high hydrostatic pressure Misiuk, A. SPIE-The International Society for Optical Engineering	10 国際会議録 Effect of stress exerted by Si3N4 and SiO2 insulation layers on donor generation in surface layer of Czochralski-grown silicon Jung,W., Misiuk,A., Bak-Misiuk,J., Rozental,M. SPIE - The International Society for Optical Engineering
5 国際会議録 FTIR study of oxygen precipitation in high-pressure-treated Cz-Si contaminated by transition metals Surma,B., Misiuk,A., Mozdzonek,M., Hartwig,J., Prieur,E. SPIE-The International Society for Optical Engineering	11 国際会議録 Photoluminescence of Ring-Distribution of Oxygen Precipitates in Czochralski Silicon Terashima,K., Ikarashi,T., Ono,H., Tajima,M. Trans Tech Publications
6 国際会議録 Peculiarities of the thermal donor formation in Czochralski-grown silicon under high hydrostatic pressure Emtsev,V.V., Oganesyan,G.A., Misiuk,A., Londos,C.A. SPIE-The International Society for Optical Engineering	12 国際会議録 New Silicon-Based Materials for Spintronics Applications - Si:V and Si:Cr A. Misiuk, L. Chow, A. Barcz, B. Surma, J. Bak-Misiuk, P. Romanowski Electrochemical Society

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