New approach to optical proximity correction
- 著者名:
Rosenbusch,A. ( Sigma-C GmbH ) Juffermans,A.H. Kirsch,H. Lalanne,F.P. Maurer,W. Romeo,C. Ronse,K. Schiavone,P. Simecek,M. Toublan,O. Watson,J.C. Ziegler,W. Zimmermann,R. - 掲載資料名:
- 18th Annual BACUS Symposium on Photomask Technology and Management
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3546
- 発行年:
- 1998
- 開始ページ:
- 585
- 終了ページ:
- 593
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430076 [0819430072]
- 言語:
- 英語
- 請求記号:
- P63600/3546
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society for Optical Engineering |
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SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |