Intrinsic stress measurements in CVD diamond films

Intrinsic stress measurements in CVD diamond films

著者名:

掲載資料名:

Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

594

発行年:

2000

開始ページ:

325

出版情報:

Warrendale, Pa.: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558995024 [1558995021]

言語:

英語

請求記号:

M23500/594

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019897
シリーズID:	PA00000011
会議名:	Thin Films-Stresses and Mechanical Properties : Symposium
回次:	8th
会議開催地:	Boston, MA, USA
会議開催年:	1999.11.29-1999.12.03

類似資料:

1 国際会議録 Intrinsic stress measurements in CVD diamond films Yu, Jin, Kim, J. G., Shon, Y. C., Lee, Y. S. MRS-Materials Research Society	7 国際会議録 HYDROGENATED SILICON FILMS PREPATED BY REMOTE PLASMA CVD Kim, S. C, Lee, S. K., Soe, S. M., Koh, S. O., Ihm, S. S., Jun, J. M., Kim, T. G., Chung, M. H., Lee, K. H., Song, H. … Materials Research Society
2 国際会議録 Measurement and Modeling of Intrinsic Stresses in CVD W Lines Lee, Jin, Ma, Qing, Marieb, Thomas, Mack, Anne S., Fujimoto, Harry, Flinn, Paul, Woolery, Bruce, Keys, Linda MRS - Materials Research Society	8 国際会議録 Intrinsic and Thermal Stress in Gallium Nitride Epitaxial Films Ager, J. W., III, Suski, T., Ruvimov, S., Kruger, J., Conti, G., Weber, E. R., Bremser, M. D., Davis, R., Kuo, C. P. MRS - Materials Research Society
3 国際会議録 Electrical properties in CVD Diamond films Zhao, S., Gan, K. K., Kagan, H., Kass, R., Malchow, R., Morrow, F., Palmer, W., White, C., Pan, L. S., Han, S., Kania, … MRS - Materials Research Society	9 国際会議録 Reactive ion etching of CVD diamond films for MEMS applications Ding,G.-F., Zhao,X.-L., Yu,A., Yang,C.-S., Cai,B., Yao,X. SPIE-The International Society for Optical Engineering
4 国際会議録 Grain Impingement and Intrinsic Stresses in CVD Diamond Nijhawan, S., Rankin, J., Walden, B. L., Sheldon, B. W. MRS - Materials Research Society	10 国際会議録 SELECTIVE METALLIZATION OF CVD DIAMOND FILMS Calvert, J. M., Pehrsson, P.E., Dulcey, C. S, Peckerar, M. C. Materials Research Society
5 国際会議録 Measurement of Stress in CVD Diamond Films Gray, K. J., Olson, J. M., Wlndischmann, H. Materials Research Society	11 国際会議録 A novel method for the measurement of the residual stress of surface-micromachined structures for MEMS (Invited Paper) Kim, J.-H., Kim, J.-G., Yeon, S.-C., Hahn, J.-H., Lee, H.-Y., Kim, Y.-H. SPIE-The International Society for Optical Engineering
6 国際会議録 The Control of Intrinsic Stresses in CVD Diamond Films With Multistep Processing Nijhawan, S., Jankovsky, S. M., Sheldon, B. W. MRS - Materials Research Society	12 国際会議録 Molecular Dynamics Analysis of Structure and Intrinsic Stress in Amorphous Silicon Carbide Film with Deposition Process Parameters Kim, J.Y., Lee, B.W., Nam, H.S., Kwon, D. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12