Mechanical properties and adhesion of PZT thin films for MEMS

Mechanical properties and adhesion of PZT thin films for MEMS

著者名:

掲載資料名:

Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

594

発行年:

2000

開始ページ:

225

出版情報:

Warrendale, Pa.: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558995024 [1558995021]

言語:

英語

請求記号:

M23500/594

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019897
シリーズID:	PA00000011
会議名:	Thin Films-Stresses and Mechanical Properties : Symposium
回次:	8th
会議開催地:	Boston, MA, USA
会議開催年:	1999.11.29-1999.12.03

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